| Chemical Formula | CH4 |
| Molecular Weight | 16.04 g/mol |
| Melting Point (MP) | -182.5°C |
| Boiling Point (BP) | -161.5°C |
| Gas Density (0°C, 101.325 kPa) | 0.656 g/L |
| Critical Temperature (Tc) | -82.5°C |
| Critical Pressure (Pc) | 4.6 MPa |
| Critical Density | 0.16 g/cm3 |
| Enthalpy of Fusion | 0.94 kJ/mol |
| Enthalpy of Vaporization | 8.17 kJ/mol |
| Specific Heat Capacity | 35.7 J/mol·K |
| Viscosity | 11.2 μPa·s |
| Vapor Pressure | 180 kPa |
| Application | Used extensively in thin film deposition, etching, doping, and diffusion processes. |
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